Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors

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Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and Berg, A. van den (2000) Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 113072