Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors
Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and Berg van den, A. (2000) Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/16187|
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