Micro-machined structures for thermal measurement of fluid and flow parameters

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Baar van, J.J.J. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Micro-machined structures for thermal measurement of fluid and flow parameters. In: MicroMechanics Europe Conference, MME 2000, October 1-3, 2000, Uppsala, Sweden.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 113071