Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

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Baar van, J.J.J. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

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