Bonding and etching techniques for precision frabrication of reliable microvalves

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Oosterbroek, R.E. and Gui, C. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2000) Bonding and etching techniques for precision frabrication of reliable microvalves. In: MicroTAS 2000 Conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 179-182).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 113063