Bonding and etching techniques for precision frabrication of reliable microvalves

Oosterbroek, R.E. and Gui, C. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg van den, A. (2000) Bonding and etching techniques for precision frabrication of reliable microvalves. In: MicroTAS 2000 Conference, May 14-18, 2000, Enschede, The Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16178
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Metis ID: 113063