A new class of thermal flow sensors using ΔT=0 as a control signal

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M. (2000) A new class of thermal flow sensors using ΔT=0 as a control signal. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, 23-27 January 2000, Miyazaki, Japan .

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Abstract:	In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences for simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry.
Item Type:	Conference or Workshop Item
Copyright:	©2000 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16176
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2000.838572
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