MAFIAS in modules

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Veenstra, T.T. and Tiggelaar, R.M. and Mateman, R. and Sanders, R.G.P. and Wissink, J. and Prak, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) MAFIAS in modules. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

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Item Type:Conference or Workshop Item
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 113059