MAFIAS in modules


Veenstra, T.T. and Tiggelaar, R.M. and Mateman, R. and Sanders, R.G.P. and Wissink, J. and Prak, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) MAFIAS in modules. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

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