Silicon based microfabrication of micro fluidic systems

Gardeniers, J.G.E. and Berg van den, A. (2000) Silicon based microfabrication of micro fluidic systems. In: 3rd symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16173
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Metis ID: 113058