Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves


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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves. In: MSM International Conference on Modeling and Simulation of Microsystems, April 6-8, 1998, Santa Clara, CA, USA (pp. pp. 528-533).

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Abstract:This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.
Item Type:Conference or Workshop Item
Copyright:© 1998 NSTI Nano Science and Technology Institute
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/16133
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Metis ID: 113018