Utilizing the {111} plane switch-over etching process for micro fluid control applications

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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Utilizing the {111} plane switch-over etching process for micro fluid control applications. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 113017