A novel micromechanical flow controller

Toor van, M.W. and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1996) A novel micromechanical flow controller. Journal of Micromechanics and Microengineering, 7 (3). pp. 165-169. ISSN 0960-1317

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Abstract:	A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.
Item Type:	Article
Copyright:	© 1996 IOP Publishing
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16027
Official URL:	http://dx.doi.org/10.1088/0960-1317/7/3/023
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