Towards position control of electrostatic comb drives

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Legtenberg, R. and Groneveld, A.W. and Elwenspoek, M.C. (1995) Towards position control of electrostatic comb drives. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/16025
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Metis ID: 112907