Stationary hillocks on etching silicon

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Elwenspoek, M.C. (1998) Stationary hillocks on etching silicon. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 70-73).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112905