Velocity sources as an explanation for experimentally observed variations in Si etch rates
Nijdam, A.J. and Berenschot, J.W. and Suchtelen van, J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Velocity sources as an explanation for experimentally observed variations in Si etch rates. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway.
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/16022|
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