Microsieves made with laser interference lithography for micro filtration applications

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Rijn, C.J.M. van and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and Wolferen, H.A.G.M. van and Elwenspoek, M.C. (1998) Microsieves made with laser interference lithography for micro filtration applications. In: Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. pp. 100-103).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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