Microsieves made with laser interference lithography for micro filtration applications

Rijn van, C.J.M. and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and Wolferen van, H.A.G.M. and Elwenspoek, M.C. (1998) Microsieves made with laser interference lithography for micro filtration applications. In: Proceedings of the Micromechanics Europe 1998 Conference (MME).

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16021
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Metis ID: 112903