Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg van den, A. and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16020
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Metis ID: 112902