Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 104-107).

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Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112902