Bi-directional fast flow sensor with a large dynamic range


Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1998) Bi-directional fast flow sensor with a large dynamic range. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 194-197).

open access
Abstract:In this article an extended mass-flow sensor is presented. Apart from the
magnitude of the flow, as an add-on to the traditional anemometer, this sensor
also measures the direction of the flow. This is of interest for the flow sensor
market in general, and more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 mm/s airflow up to high flow levels of 1 m/s The response time is in the order of milliseconds.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 112900