The two sensor µ-flown : an improved flow sensing principle


Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Elwenspoek, Miko (1996) The two sensor µ-flown : an improved flow sensing principle. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium (pp. pp. 1301-1304).

open access
Abstract:A novel flow sensing principle will be presented which combines the advantages
of both the anemometer and the mass flow sensor. The sensor consists of two
elements which are used as both sensor and heater. For small flows a qualitative
model of sensitivity and frequency response as well as measurements will be
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 112897