The two sensor µ-flown : an improved flow sensing principle

Bree de, Hans-Elias and Leussink, Peter and Korthorst, Twan and Elwenspoek, Miko (1996) The two sensor µ-flown : an improved flow sensing principle. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium.

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Abstract:	A novel flow sensing principle will be presented which combines the advantages of both the anemometer and the mass flow sensor. The sensor consists of two elements which are used as both sensor and heater. For small flows a qualitative model of sensitivity and frequency response as well as measurements will be presented.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16015
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