The two sensor µ-flown : an improved flow sensing principle

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Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Elwenspoek, Miko (1996) The two sensor µ-flown : an improved flow sensing principle. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium (pp. pp. 1301-1304).

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Abstract:A novel flow sensing principle will be presented which combines the advantages
of both the anemometer and the mass flow sensor. The sensor consists of two
elements which are used as both sensor and heater. For small flows a qualitative
model of sensitivity and frequency response as well as measurements will be
presented.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/16015
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Metis ID: 112897