An electrochemically actuated microvalve

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) An electrochemically actuated microvalve. In: ACTUATOR 96, 5th International Conference on New Actuators, 26-28 June 1996, Bremen, Germany.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16014
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Metis ID: 112896