An electrochemically actuated microvalve


Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) An electrochemically actuated microvalve. In: 5th International Conference on New Actuators, ACTUATOR 1996, 26-28 June 1996, Bremen, Germany (pp. pp. 41-44).

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