Silicon fusion bonding of rough surface with polishing technique

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Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding of rough surface with polishing technique. In: Micro System Technologies '96. VDE-Verlag, Berlin, pp. 205-210.

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Item Type:Book Section
Copyright:© 1996 VDE-Verlag
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/16013
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Metis ID: 112895