Porous silicon bulk micromachining for thermally isolated mambrane formation

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Ducso, Cs. and Vazsonyi, E. and Adam, M. and Barsony, I. and Gardeniers, J.G.E. and Berg, A. van den (1996) Porous silicon bulk micromachining for thermally isolated mambrane formation. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium (pp. pp. 227-230).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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