Porous silicon bulk micromachining for thermally isolated mambrane formation

Ducso, Cs. and Vazsonyi, E. and Adam, M. and Barsony, I. and Gardeniers, J.G.E. and Berg van den, A. (1996) Porous silicon bulk micromachining for thermally isolated mambrane formation. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16012
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