Side-wall spacers for stiction reduction in surface micromachined mechanisms

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Tas, N.R. and Elwenspoek, M.C. and Legtenberg, R. (1996) Side-wall spacers for stiction reduction in surface micromachined mechanisms. In: Micro Mechanics Europe, MME, 21-22 October 1996, Barcelona, Spain.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112891