Modular concept for fluid handling systems: a demonstrator micro analysis system


Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M. and Fluitman, J.H.J. and Berg, A. van den (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 389-394).

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Abstract:A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics
Item Type:Conference or Workshop Item
Copyright:© 1996 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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