Etching technology for microchannels


Tjerkstra, R. Willem and Boer, Meint de and Berenschot, Erwin and Gardeniers, J.G.E. and Berg, Albert van den and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 147-152).

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Abstract:Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSICs and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world
Item Type:Conference or Workshop Item
Copyright:© 1997 IEEE
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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