Etching technology for microchannels


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Tjerkstra, R. Willem and Boer de, Meint and Berenschot, Erwin and Gardeniers, J.G.E. and Berg van den, Albert and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan.

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Abstract:Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSICs and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world
Item Type:Conference or Workshop Item
Copyright:© 1997 IEEE
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/16003
Official URL:http://dx.doi.org/10.1109/MEMSYS.1997.581790
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