Etching technology for microchannels

Tjerkstra, R. Willem and Boer de, Meint and Berenschot, Erwin and Gardeniers, J.G.E. and Berg van den, Albert and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan.

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Abstract:	Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSICs and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world
Item Type:	Conference or Workshop Item
Copyright:	© 1997 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16003
Official URL:	http://dx.doi.org/10.1109/MEMSYS.1997.581790
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