Surface micromachined linear electrostatic stepper motor


Tas, N.R. and Sonnenberg, A.H. and Sander, A.F.M. and Elwenspoek, M.C. (1997) Surface micromachined linear electrostatic stepper motor. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 215-220).

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Abstract: A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 ¿m, with steps in the order of 2 ¿m. The deflection is limited by the suspension. The generated force equals 3 ¿N at 40 V driving voltage
Item Type:Conference or Workshop Item
Copyright:© 1997 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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