The shuffle motor: a high force, high precision linear electrostatic stepper motor


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Tas, Niels and Wissink, Jeroen and Sander, Louis and Lammerink, Theo and Elwenspoek, Miko (1997) The shuffle motor: a high force, high precision linear electrostatic stepper motor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS 1997, June 16-19, 1997, Chicago, USA.

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Abstract: The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 ¿N at 40 V clamping voltage and 25 V actuator voltage
Item Type:Conference or Workshop Item
Copyright:© 1997 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/16000
Official URL:http://dx.doi.org/10.1109/SENSOR.1997.635215
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Metis ID: 112882