Designing, realization and characterization of a novel capacitive pressure/flow sensor

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Berg van den, A. and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA.

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Abstract:	This paper reports the design, realization and characterization results of an integrated pressure/flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises highly accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques
Item Type:	Conference or Workshop Item
Copyright:	© 1997 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15999
Official URL:	http://dx.doi.org/10.1109/SENSOR.1997.613605
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