Novel microstructures and technologies applied in chemical analysis techniques


Spiering, Vincent L. and Moolen, Johannes N. van der and Burger, Gert-Jan and Berg, Albert van den (1997) Novel microstructures and technologies applied in chemical analysis techniques. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 511-514).

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Abstract:Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio's similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections
Item Type:Conference or Workshop Item
Copyright:© 1997 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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