A new fabrication method for in-plane micro fluid handling components and analysis systems

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg van den, A. and Elwenspoek, M.C. (1998) A new fabrication method for in-plane micro fluid handling components and analysis systems. In: Sensor technology in the Netherlands : state of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998. Kluwer Academic, Dordrecht, pp. 85-90. ISBN 9780792350101

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Item Type:	Book Section
Copyright:	© 1998 Kluwer Academic
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15993
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Metis ID: 112875