A new fabrication method for in-plane micro fluid handling components and analysis systems


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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg van den, A. and Elwenspoek, M.C. (1998) A new fabrication method for in-plane micro fluid handling components and analysis systems. In: Sensor technology in the Netherlands : state of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998. Kluwer Academic, Dordrecht, pp. 85-90. ISBN 9780792350101

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Item Type:Book Section
Copyright:© 1998 Kluwer Academic
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15993
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