Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98, 6-8 April, 1998, Santa Clara, CA, USA.

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Abstract:Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15992
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