An electrostatic lower stator axial gap wobble motor: design and fabrication


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Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Lammerink, Theo and Elwenspoek, Miko (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 404-407).

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Abstract:The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.
Item Type:Conference or Workshop Item
Copyright:© 1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15989
Official URL:http://dx.doi.org/10.1109/SENSOR.1995.721832
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Metis ID: 112871