Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

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Albers, H. and Hilderink, L.T.H. and Snilagyi, E. and Passti, F. and Lambeck, P.V. and Popma, Th.J.A. (1995) Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In: 8th Annual Meeting Conference of the Lasers and Electro-Optics Society, LEOS , 30-31 October 1995 , San Fransisco, USA (pp. pp. 88-89).

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Abstract:The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses
Item Type:Conference or Workshop Item
Copyright:©1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15868
Official URL:http://dx.doi.org/10.1109/LEOS.1995.484610
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Metis ID: 112750