Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

Albers, H. and Hilderink, L.T.H. and Snilagyi, E. and Passti, F. and Lambeck, P.V. and Popma, Th.J.A. (1995) Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In: 8th Annual Meeting Conference of the Lasers and Electro-Optics Society, LEOS , 30-31 October 1995 , San Fransisco, USA.

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Abstract:	The hydrogen in PECVD-SiOxNy was studied with IR spectroscopy and ERD analysis as a function of the O/N ratio and the annealing treatment up to 1150°C. The results were compared with measured spectral waveguide losses
Item Type:	Conference or Workshop Item
Copyright:	©1995 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/15868
Official URL:	http://dx.doi.org/10.1109/LEOS.1995.484610
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