A waveguide material for integrated optical sensors: silicon oxynitride

Share/Save/Bookmark

Albers, H. and Hilderink, L.T.H. and Berends, J.H. and Wörhoff, K. and Hulst, N.F. van and Lambeck, P.V. (1996) A waveguide material for integrated optical sensors: silicon oxynitride. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 221-230).

open access
[img]
Preview
PDF
534kB
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15866
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 112748