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A waveguide material for integrated optical sensors: silicon oxynitride
Albers, H. and Hilderink, L.T.H. and Berends, J.H. and Wörhoff, K. and Hulst van, N.F. and Lambeck, P.V. (1996) A waveguide material for integrated optical sensors: silicon oxynitride. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands.
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| Item Type: | Conference or Workshop Item |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
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| Link to this item: | http://purl.utwente.nl/publications/15866 |
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