A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride

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Ridder, René M. de and Wijbrans, Rokus A. and Albers, Hans and Aukema, Jacob S. and Lambeck, Paul V. and Hoekstra, Hugo J.W.M. and Driessen, Alfred (1995) A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride. In: 8th Annual Meeting Conference of the Lasers and Electro-Optics Society, LEOS , 30-31 October 1995, San Francisco, CA , USA (pp. pp. 86-87).

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Abstract:A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 ¿m residual width
Item Type:Conference or Workshop Item
Copyright:©1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15863
Official URL:http://dx.doi.org/10.1109/LEOS.1995.484609
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Metis ID: 112745