A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride

Ridder de, René M. and Wijbrans, Rokus A. and Albers, Hans and Aukema, Jacob S. and Lambeck, Paul V. and Hoekstra, Hugo J.W.M. and Driessen, Alfred (1995) A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride. In: 8th Annual Meeting Conference of the Lasers and Electro-Optics Society, LEOS , 30-31 October 1995, San Francisco, CA , USA.

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Abstract:	A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 ¿m residual width
Item Type:	Conference or Workshop Item
Copyright:	©1995 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/15863
Official URL:	http://dx.doi.org/10.1109/LEOS.1995.484609
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Metis ID: 112745