New developments in wet chemical etching and fusion bonding

Share/Save/Bookmark

Elwenspoek, M.C. and Gui, C. (1998) New developments in wet chemical etching and fusion bonding. In: Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting (pp. pp. 192-205).

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15837
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 112719