Wet and dry etching techniques for the release of submicron perforated membranes

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Kuiper, Stein and Boer de, Meint and Rijn van, Cees and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (1999) Wet and dry etching techniques for the release of submicron perforated membranes. In: 10th Micromechanics Europe Workshop, MME 1999, 27-28 September 1999, Gif-sur-Yvette, France.

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Metis ID: 112718