Wet and dry etching techniques for the release of submicron perforated membranes

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Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (1999) Wet and dry etching techniques for the release of submicron perforated membranes. In: 10th Micromechanics Europe Workshop, MME 1999, 27-28 September 1999, Gif-sur-Yvette, France (pp. pp. 168-171).

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Item Type:Conference or Workshop Item
Additional information:Verschenen in Journal of Micromechanics and Microengineering, Volume 10, Number 2
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15836
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Metis ID: 112718