Three-dimensional sound intensity measurements using microflown particle velocity sensors


Share/Save/Bookmark

Bree, Hans-Elias de and Druyvesteyn, W.F. and Berenschot, E. and Elwenspoek, M. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 124-129).

open access
[img]
Preview
PDF
724kB
Abstract:This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micromachined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realised based on a three-dimensional micromachined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone
Item Type:Conference or Workshop Item
Copyright:© 1999 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15835
Official URL:http://dx.doi.org/10.1109/MEMSYS.1999.746785
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 112717