A low noise microphone based on the microflown technology
Bree, H-E. de and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) A low noise microphone based on the microflown technology. In: Transducers '99, 10th International Conference on Solid-State Sensors and Actuators, June 7-10, 1999, Sendai, Japan.
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|Item Type:||Conference or Workshop Item|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/15834|
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