A low noise microphone based on the microflown technology

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Bree de, H-E. and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) A low noise microphone based on the microflown technology. In: Transducers '99, 10th International Conference on Solid-State Sensors and Actuators, June 7-10, 1999, Sendai, Japan.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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