Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Wiegerink, R.J. and Zwijze, A.F. and Mateman, R. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15830
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