Metal thin film thermocouples for use in MST

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Leussink, P.J. and Jansen, H.V. and Krijnen, G.J.M. and Elwenspoek, M. (1999) Metal thin film thermocouples for use in MST. In: Eurosensors XIII, European Conference on Solid-State Transducers, September 12-15, 1999, The Hague, the Netherlands.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112710