The microflown, from die to product


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Bree de, Hans-Elias and Elwenspoek, Miko (1999) The microflown, from die to product. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

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Abstract:This article reports on various steps to transform a concept to a product. A sound intensity probe based on a micro-machined acoustic sensor "the Microflown" is used as an example. Requirements for the micromachined part are simplicity and uncomplicated processing to reach a high throughput. For monitoring the quality, simple and reliable characterisation tools should be designed as well. To gain credibility independent labs should test the product. The product should offer a complete solution that competes in overall costs and performance, and it must be possible to connect it into existing systems.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15827
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