Low-cost piezoresistive silicon load cell independent of force distribution


Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low-cost piezoresistive silicon load cell independent of force distribution. In: Micromechanics Europe Conference, MME 1999, September 27-28, 1999, Gif-sur-Yvette, France.

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Abstract:A silicon load cell (force sensor) is presented which is
based on a new operating principle. The force is measured
by compressing a meander like strain gage. A second
strain gage which is not loaded, is used for temperature
compensation and for compensation of bending and
stretching stresses in the chip. Also, same changes in zero
load resistor values are eliminated. It is shown that the
output of the bridge is a linear function of the total force
and independent of the force distribution on the silicon
chip. Measurements up to 1000 kg show a linear respons
and a short term repeatability which is within 0.1 %.
Creep after 30 minutes is within 1.2 %.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15826
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