Characterization and optimization of mono-crystalline in-plane operating check valves

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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization and optimization of mono-crystalline in-plane operating check valves. In: IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7-10 June 1999, Sendai, Japan (pp. pp. 1816-1819).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112706