Characterization and optimization of mono-crystalline in-plane operating check valves

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg van den, A. (1999) Characterization and optimization of mono-crystalline in-plane operating check valves. In: IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7-10 June 1999, Sendai, Japan.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15824
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Metis ID: 112706