High pressure check valve for application in a miniature cryogenic scorption cooler

Burger, J.F. and Wekken van der, M.C. and Berenschot, E. and Holland, H.J. and Brake ter, H.J.M. and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) High pressure check valve for application in a miniature cryogenic scorption cooler. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA.

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Abstract:	This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application In a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field
Item Type:	Conference or Workshop Item
Copyright:	© 1999 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Low Temperatures - Biomagnetism (LT) Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15823
Official URL:	http://dx.doi.org/10.1109/MEMSYS.1999.746803
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