Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogenous load distributions


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Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogenous load distributions. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, January 17-21, 1999, Orlando, FL, USA.

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Abstract:In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible
Item Type:Conference or Workshop Item
Copyright:© 1999 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15820
Official URL:http://dx.doi.org/10.1109/MEMSYS.1999.746889
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Metis ID: 112702