The use of selective anodic bonding to create near-zero dead volume membranes


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Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (1999) The use of selective anodic bonding to create near-zero dead volume membranes. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

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Item Type:Conference or Workshop Item
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112700