The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg van den, A. (1999) The use of selective anodic bonding to create near-zero dead volume membranes. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15818
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Metis ID: 112700