Selective fusion bonding by surface roughness control

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg van den, A. and Elwenspoek, M.C. (1999) Selective fusion bonding by surface roughness control. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15817
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Metis ID: 112699