Application of a microflown as a low-cost level-sensor

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Honschoten, J. van and Baar, J. van and Bree, H.E. de and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (1999) Application of a microflown as a low-cost level-sensor. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 124-127).

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Abstract:In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15816
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