The electrolysis of water: an actuation principle for MEMS with a big opportunity

Rusu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) The electrolysis of water: an actuation principle for MEMS with a big opportunity. In: 6th International conference on New Actuators with accompanying exhibition, 17-19 June, 1998, Bremen, Germany.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/15814
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