The electrolysis of water: an actuation principle for MEMS with a big opportunity
Rusu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) The electrolysis of water: an actuation principle for MEMS with a big opportunity. In: 6th International conference on New Actuators with accompanying exhibition, 17-19 June, 1998, Bremen, Germany.
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|Item Type:||Conference or Workshop Item|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
|Link to this item:||http://purl.utwente.nl/publications/15814|
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