In-plane oriented fluid control components, fabricated with new etching techniques

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg van den, A. and Elwenspoek, M.C. (1998) In-plane oriented fluid control components, fabricated with new etching techniques. In: Actuator 98, 6th international conference on new actuators, 17-19 June 1998, Bremen, Germany.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/15813
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Metis ID: 112695