In-plane oriented fluid control components, fabricated with new etching techniques


Share/Save/Bookmark

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) In-plane oriented fluid control components, fabricated with new etching techniques. In: Actuator 98, 6th international conference on new actuators, 17-19 June 1998, Bremen, Germany (pp. pp. 43-46).

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15813
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 112695