Mechanical microsensors

Elwenspoek, Miko and Wiegerink, Remco J. (1999) Mechanical microsensors. Microtechnoloy and Mems . Swiss Foundation for Research in Microtechnology (FSRM), Neuchatel, Zwitserland. ISBN 9783540675822

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Item Type:	Book
Copyright:	© 1999 Springer
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15571
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Metis ID: 112453